Elements of MEMS

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MEMS area. AFM image.Semi-contact mode. Topography. MEMS area. AFM image.Semi-contact mode. Phase image.
MEMS area. AFM image.Semi-contact mode. Topography 3D. MEMS area. AFM image.Semi-contact mode. Topography and cross-section.
MEMS area. AFM image.Semi-contact mode. Profile in cross-section.

MEMS area. AFM image.Semi-contact-mode. Images was obtained with SPM Certus Standard.

Image size 90х60 μm, 300х300 points.

Upper left image - topography. Upper right image - phase image.

Lower left image - topography 3D. Upper right image - topography and cross-section.

Lower image - profile in cross-section.

MEMS area. AFM image.Semi-contact mode. Topography. MEMS area. AFM image.Semi-contact mode. Topography 3D.
MEMS area. AFM image.Semi-contact mode. Profile in cross-section. MEMS area. AFM image.Semi-contact mode. Topography and cross-section.

MEMS area. AFM image.Semi-contact-mode. Images was obtained with SPM Certus Standard.

Image size 45х50 μm, 880х890 points.

Upper left image - topography. Upper right image - topography 3D.

Lower left image - profile in cross-section. Upper right image - topography and cross-section.

Lower image - profile in cross-section.

MEMS area. AFM image.Semi-contact mode. Topography. MEMS area. AFM image.Semi-contact mode. Topography 3D.
MEMS area. AFM image.Semi-contact mode. Profile in cross-section. MEMS area. AFM image.Semi-contact mode. Topography and cross-section.

MEMS area. AFM image.Semi-contact-mode. Images was obtained with SPM Certus Standard.

Image size 20х20 μm,400х400 points.

Upper left image - topography. Upper right image - topography 3D.

Lower left image - profile in cross-section. Upper right image - topography and cross-section.

Lower image - profile in cross-section.

MEMS area. AFM image.Semi-contact mode. Topography. MEMS area. AFM image.Semi-contact mode. Phase image.
MEMS area. AFM image.Semi-contact mode. Topography 3D. MEMS area. AFM image.Semi-contact mode. Topography and cross-section.
MEMS area. AFM image.Semi-contact mode. Profile in cross-section.

MEMS area. AFM image.Semi-contact-mode. Images was obtained with SPM Certus Standard.

Image size 10х10 μm, 400х400 points.

Upper left image - topography. Upper right image - phase image.

Lower left image - topography 3D. Upper right image - topography and cross-section.

Lower image - profile in cross-section.

MEMS area. AFM image.Semi-contact mode. Topography. MEMS area. AFM image.Semi-contact mode. Phase image.
MEMS area. AFM image.Semi-contact mode. Topography 3D. MEMS area. AFM image.Semi-contact mode. Topography and cross-section.
MEMS area. AFM image.Semi-contact mode. Profile in cross-section.

MEMS area. AFM image.Semi-contact-mode. Images was obtained with SPM Certus Standard.

Image size 5х5 μm, 400х400 points.

Upper left image - topography. Upper right image - phase image.

Lower left image - topography 3D. Upper right image - topography and cross-section.

Lower image - profile in cross-section.

MEMS area. AFM image.Semi-contact mode. Topography. MEMS area. AFM image.Semi-contact mode. Phase image.
MEMS area. AFM image.Semi-contact mode. Topography 3D. MEMS area. AFM image.Semi-contact mode. Topography and cross-section.
MEMS area. AFM image.Semi-contact mode. Profile in cross-section.

MEMS area. AFM image.Semi-contact-mode. Images was obtained with SPM Certus Standard.

Image size 15х15 μm, 400х400 points.

Upper left image - topography. Upper right image - phase image.

Lower left image - topography 3D. Upper right image - topography and cross-section.

Lower image - profile in cross-section.

The samples provided by S.A. Zhukova, Ph.D.

 

Нитрид галлия (GaN) на сапфировой подложке. АСМ изображение. Полу-контактный режим сканирования. Изображение в режиме фазы.

Gallium nitride (GaN) on sapphire surface Gallery Indium phosphide (InP) on sapphire surface
h2

 

profile in cross-section